Delivers improved etch process control for next-generation process nodes
ANDOVER, Mass., July 10, 2018 (GLOBE NEWSWIRE) — MKS Instruments, Inc. (NASDAQ:MKSI), a global provider of technologies that enable advanced processes and improve productivity, today announced the release of its revolutionary Enhanced Etch Sensor for the Baratron® E28 and DA02 capacitance manometer product line.
The Enhanced Etch Sensor delivers low-pressure control for next-generation process nodes by providing a 5x decrease in drift associated with fluorine used in etch, including atomic layer etch applications. “Innovation that enables our customers to do more is at the heart of what MKS delivers, and the market leading Enhanced Etch Sensor is evidence of our commitment,” said Tim Haynes, Vice President and General Manager of Pressure Products.
Fluorine gas is a corrosive gas commonly used in semiconductor etch processes. At the lower operating pressures associated with next-generation process nodes, fluorine causes a drift that impacts capability and productivity. “Modeling of the sensor based on our knowledge of the etch process was a key factor in the optimization of our sensor development,” said Phillip Sullivan, CTO of Pressure Products.
The Enhanced Etch Sensor continues a rich history of innovation in the Baratron® capacitance manometer product line. Find out more about our product here.
About MKS Instruments
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, RF & DC power, reactive gas generation, vacuum technology, lasers, photonics, sub-micron positioning, vibration isolation, and optics. Our primary served markets include semiconductor capital equipment, general industrial, life sciences, and research. Additional information can be found at www.mksinst.com.
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