Malaysian based wafer foundry, SilTerra Malaysia Sdn. Bhd., today
unveiled a “Piezoelectric Micromachined Ultrasound transducer (PMUT) on
CMOS” platform for Finger-print sensing and Medical imaging applications.
This unique process platform offers a truly monolithic solution and
integrates the PMUT on the top of the CMOS resulting in a single-chip
solution. The PMUT is formed using a CMOS compatible piezoelectric
material and surface micro-machining techniques.
Designers can choose any of the SilTerra’s traditional CMOS/BCD/RF/Ultra
low power platforms (180nm or 130nm) and build the PMUT on the top of
This platform is supported by the relevant CMOS IP and PDK to enable a
fully integrated System-On-Chip.
The PDK supports a configurable PMUT cell to address different end
market applications such as a 20MHz PMUT cell for finger-print sensing
or a 5MHz PMUT cell for medical imaging.
SilTerra’s “PMUT on CMOS” platform is currently available for
“We are very pleased to release this innovative process for prototyping.
As this process uses most of the standard CMOS process modules, we are
confident to achieve manufacturability and defect density levels similar
to the traditional CMOS technologies. By offering a truly monolithic
solution, we managed to reduce the parasitics significantly and also
offer high fill-factors” quoted Arjun Kumar Kantimahanti, Senior Vice
President of MEMS & Sensors BU, SilTerra.
To learn more about this platform, please visit: http://www.silterra.com/technologies.html#tab_mems
About SilTerra Malaysia Sdn Bhd:SilTerra Malaysia Sdn Bhd
is a semiconductor wafer foundry offering fabrication and design support
services in CMOS logic, High-Voltage, Mixed-signal, RF, BCD, Power,
Silicon Photonics and MEMS technologies down to 90 nanometer feature
size. SilTerra’s wafer fab has a design-in capacity of 46,000 eight-inch
wafers per month and currently serves customers in US, Taiwan, Korea and
Environmentally vigilant, SilTerra delivers award-winning, world-class
performance to its customers seeking flexible capacity, custom
technologies, competitive advantages and around the clock customer
support. SilTerra is ISO 9001:2008 and ISO 14001 certified. Starting
commercial production in 2001, the company’s headquarters and factory
are located in Malaysia’s Kulim Hi-Tech Park, with sales and marketing
offices in San Jose (California) and Hsinchu (Taiwan).
For additional information on SilTerra or its services, please visit www.silterra.com.
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